Micro- and Nano-Structuring

Efficient and scalable with Nanoimprint Lithography (NIL).

Micro- and nanostructures on surfaces enable specific functional and optical product properties – particularly in micro-optics, life sciences, and premium consumer applications.

Conventional structuring methods are often too complex, uneconomical for small batches, and limited in their scalability.

Nanoimprint Lithography (NIL) enables the precise replication of micro- and nanostructures on a variety of substrates. PROFACTOR has helped shape NIL since its early days with a focus on application-oriented process development.

This allows new functional surface properties to be realized and innovative products to be scaled efficiently from prototypes and pilot runs to mass production.

Technologies

Nanoimprint Lithography (NIL)

NIL is a mature technique that uses a stamp to transfer micro- or nanopatterns cost-effectively onto substrates such as wafers, glass, ceramics, plastics, or metals.

A stamp is pressed with high positional accuracy into an imprint resist and cured via UV light, resulting in a high-precision reproduction of the stamp’s 3D structure.

Depending on requirements for material, throughput, or resolution, PROFACTOR utilizes the following processes:

Wafer Level Nanoimprinting

Large-scale replication of micro- and nanostructures directly on wafers. This process offers excellent reproducibility with high throughput and high resolution.

Typical applications include diffractive optics, metasurfaces, microfluidics, sensors, and advanced semiconductor packaging.

Roll-to-Plate Nanoimprinting

Nanostructures are transferred with high accuracy from a roll to a polymer film on a substrate.

Due to its high throughput and replication quality, this method is particularly suitable for the mass production of optical components like diffraction gratings and metasurfaces.

Step & Repeat Nanoimprinting

Enables the position-accurate replication of high-precision nanostructures from a single stamp onto large-area substrates.

Step & Repeat Nanoimprinting is used both for manufacturing large-area stamps and for producing small quantities of optical, photonic, and microfluidic components.

Solutions for Precise Micro- and Nanostructures

Our proven nanoimprint technology platform forms the basis for the efficient development and production of your micro- and nanostructures.

Reihe transparenter Substrate mit nanostrukturierten optischen Oberflächen während der Prototypen- und Kleinserienfertigung mittels Nanoimprint-Lithographie.

NIL Prototyping und Small Series

Individual process development for micro- and nanostructures on different materials; rigid or flexible, flat or curved substrates.

We apply established processes for the production of permanent structures, etching masks, or special designs such as free-standing or undercut structures.

Production ranges from individual demonstrators to small series.

Nanoimprint-Lithographie Step-and-Repeat-System im Reinraum zur strukturierten Herstellung von Mikrooptik-Arrays auf einem Wafer mit UV-Belichtung.

Step & Repeat NIL Lab Systems

Compact laboratory systems for the replication of structures from a few nanometers to hundreds of micrometers.

These offer simple handling and the possibility for direct observation of the process.

They are ideal for research and development as well as for the production of multi-master templates or high quantities of small NIL components.

Laborflaschen mit Anti-Sticking-Coating BGL-GZ-96 für Nanoimprint-Lithographie zur Herstellung präziser nanostrukturierter Oberflächen.

Nanoimprint Coating Materials

PROFACTOR offers special coating materials for an efficient imprinting process.
Anti-Sticking Layer (BGL-GZ-96):

Anti-stick coating with fast reaction and low surface energy;
no vacuum process necessary.

Adhesion Layer (HMNP 12):

Adhesion promoter for Si, quartz, and glass; simple drop-and-spin application, only a few nanometers thin.

Laborgerät zur Oberflächenanalyse (Bruker Edge) in einem gelb beleuchteten Reinraum; im Inneren wird ein Wafer mit grün markiertem Messraster vermessen, während auf dem danebenstehenden Monitor eine vergrößerte 3D-Darstellung einer Mikrostruktur im Mikrometerbereich angezeigt wird.

NIL Metrology Service

We support you in the characterization of your NIL surfaces, layer thicknesses, and micro- and nanostructures using our modern measurement technology for accurate analyses and reliable results.

Application Areas

Selected practical examples show the diverse use of the nanoimprint technology:

Glasplatte mit regelmäßigem Array mikrooptischer Strukturen, gehalten von einer behandschuhten Hand im Labor – hergestellt mittels Nanoimprint-Lithographie für optische und photonische Anwendungen.

Cost-effective production of precise micro-optical elements such as microlenses, micromirrors, or waveguides.

Laserlicht trifft auf nanostrukturierte optische Oberfläche und erzeugt Beugungsmuster – Demonstration eines nanooptischen Bauteils hergestellt mittels Nanoimprint-Lithographie.

Nanoimprinting is the optimal manufacturing method for diffractive optical elements or metalenses.

Kleines transparentes Bauteil mit schillernder nanostrukturierter Oberfläche, gehalten zwischen Fingern – Beispiel für Nanoimprint-Lithographie zur Herstellung funktionaler Nanostrukturen für Optik und Design.

Replication of refractive or diffractive optical structures for unique aesthetic effects on any product.

Mikroskopische Aufnahme eines nanostrukturierten Arrays mit regelmäßigen Mikro- und Nanoporen (Maßstab 5 µm), hergestellt mittels Nanoimprint-Lithographie für Anwendungen in Nanofluidik und Life Sciences.

Production of micro- and nanostructures for life sciences applications such as microfluidics or plasmonic sensors.

Hand mit Laborhandschuh hält transparente Glasplatte mit nanostrukturiertem Farbfilter-Array für Augmented-Reality- und optische Anwendungen, hergestellt mittels Nanoimprint-Lithographie.

Cost-effective production of high-quality optical waveguides for AR glasses.

Hand hält eine transparente optische Linse mit nanostrukturierten Anti-Reflexionsoberflächen, die farbige Lichtreflexe zeigen – Beispiel für Nanoimprint-Lithographie in der Herstellung moderner optischer Komponenten.

Replication of nanostructures on optical elements to reduce reflection and increase transmission.

Laboranlage zur Nanoimprint-Lithographie mit UV-Belichtung zur Herstellung von lichtleitenden Mikrostrukturen und optischen Bauteilen auf transparenten Substraten.

Efficient production of compact light-steering elements based on micro-optics.

Nanostrukturiertes Halbleiterbauteil für Solarenergie-Anwendungen mit integrierten Mikrostrukturen, hergestellt mittels Nanoimprint-Lithographie.

Nanoimprinting can support plasmonic and biomimetic effects for solar cells.

PROFACTOR, Your Technology Partner

From innovative ideas to industrial implementation.

Requirements, Concept, and Feasibility

After the initial exchange of information, we clarify objectives and initial requirements.

If needed, we test the basic feasibility of the technological solution in the laboratory based on your structure designs.

This creates a shared understanding of the solution concept, along with a rough cost estimate as a basis for the following development stages.

Process Development & Demonstrators

Based on your requirements and technological feasibility, we develop a customized process. We carry out detailed characterizations to safeguard the processes.

Often, process development is divided into several stages with design optimizations and regular coordination.

Finally, we manufacture and deliver the agreed quantity of prototypes, allowing you to test the functionality and quality of the components for the first time.

Small Series & Process Transfer

The process is further developed towards semi-automated production for larger quantities. Proven step-and-repeat or roll-to-plate technologies are used here.

We typically manufacture 100 to several thousand replications of your designs, allowing you to further qualify your product design and carry out initial field tests.

In a further step, we help to transfer the process into your production.

Proven Partnerships

Selected customers and partners from joint development and industrial projects.

Current Research Projects

Our technology portfolio is based on a large number of research projects with national and international partners from industry, universities and research institutions.

We combine industry requirements and global trends to develop forward-looking research projects. In this way, we work with our partners to ensure the competitiveness of industrial production.